Del Mar Photonics - NSOM applications
Fabrication and integration of VLSI micro/nano-photonic circuit board
Near field scanning optical microscopy (NSOM) can be used in the design, fabrication and integration of a
newly proposed modular system “optical printed circuit board (O-PCB).” The O-PCB is designed
to provide micro/nano-scale optical waveguides to perform the functions of
transporting, switching, routing and distributing optical signals on flat
modular boards or substrates that can lead to a platform for VLSI micro/nano-photonic
integration.
Near-field scanning optical microscopy (NSOM) for optical characterization of
micro/nano-scale photonic devices and also examine the effect of the waveguide
surface roughness on the transmission characteristics of the waveguides.
Near-field Scanning Optical Microscope (NSOM) is a versatile tool for nano-characterization
and nanomanufacturing.
Conventional microscopes have fundamentally limited resolution due to
diffraction, but there is no such restriction for near-field interactions, that
is why near-field microscopy is becoming one of the most important techniques
for nano-science.
Possible applications of this tool are characterization
of photonic nanodevices, bio photonics (investigation of cells, viruses, DNA
molecules), nano-chemistry (chemical reactions control), nanoscale
photolithography (processing of photosensitive polymers).
NSOM delivered femto-second pulses can be used for nanometer-scale surface
topology modification. Temporal resolution provided by femtosecond laser opens
wide range of new possibilities such as: transport dynamics studies of
nanostructured materials, pump-probe experiments, ultra fast coherent and Raman
spectroscopy. Spatial optical resolution of the tool is better than 100 nm and
temporal resolution in the pulse operation mode is better than 100 fs. Tunable
CW operation for spectral measurements is also available, wavelength range in
this case is 710-950 nm.
Advanced Nearfield Scanning Optical Microscopy/Atomic Force Microscopy/Scanning
Probe Microscopy systems (NSOM-AFM-SPM) are used for numerous applications in
materials research, including semiconductors, data storage, electronic
materials, solar cells, polymers, catalysts, life sciences and nano-sciences.
NSOM-AFM-SPM is a well-established method for ultra-high nano-scale spatial
resolution surface imaging and the characterization of surfaces and interfaces
down to atomic dimensions.
Keywords: Optical interconnection; Photonic integration; Microphotonics;
Nanophotonics; Micro-fabrication; Nano-fabrication; Photonic crystals
1. Introduction
2. Design of O-PCB for VLSI photonic circuits
3. Scaling rules for miniaturization and integration of VLSI waveguide circuits
4. Fabrication of polymer waveguides and circuits
5. Measurement of propagation characteristics using NSOM
6. Minimizing scattering losses incurred by waveguide wall surface
7. Nano-scale photonic crystal beam splitter devices for VLSI circuits
8. Nano-scale plasmonic devices for VLSI circuits
9. Assembly of optical circuit board
10. Summary and conclusion